Material Transport Robot for IC Fab —— Wafer Box/ FOUP Transporter / Handler
 ATR500 |
 APR500 |
The APR500 is designed for automatic handling of 300mm FOUPs (compatible with 200mm storage boxes). The ATR500 is used to transport various types of semiconductor materials to different locations. SMEE provides customized total solutions to transport materials.
Product Features
● Safe & Smart
● Flexible
● Compatible
● User Friendly HMI
● Total Solution
Specifications
|
Model |
ATR500 |
APR500 |
|
Function |
Material transportation |
Material handling |
|
Navigation Mode |
Laser intelligent guide |
Laser intelligent guide |
|
Moving Speed |
Max. 1.3m/s (Option) |
Max. 1.3m/s (Option) |
|
Charging Mode |
Automatic charging |
Automatic charging |
Products
CONTACT US
No.1525 Zhangdong Road Zhangjiang Hi-Tech Park Shanghai
info@smee.com.cn
+86-21-51315131
+86-21-58969020
