200 Series Stepper —— TFT Exposure
 SSB225 |
 SSB245 |
 SSB260 |
200 series scanner is specially designed for manufacturing process such as AM-OLED and TFT-LCD, supporting for volume production of 2.5G to 6G TFT display panels. Featured with high resolution and overlay accuracy, this series supports 6-inch reticles and greatly reduces costs for customers.
Product Features
● Resolution up to 1.5μm
● Manufacturing 12-inch panel by 6-inch mask
● Intelligent calibration and diagnosis, convenient for machine calibration and periodic maintenance
Specifications
|
Model |
Resolution |
Overlay |
Substrate Size |
|
SSB225/10 |
2μm L/S |
0.6μm |
370mm×470mm |
|
SSB225/20 |
1.5μm L/S |
0.5μm |
370mm×470mm |
| SSB245/10 | 2μm L/S | 0.6μm | 730mm×920mm |
| SSB245/20 | 1.5μm L/S | 0.5μm | 730mm×920mm |
| SSB260/10T | 2μm L/S | 0.6μm | 1300mm×1500mm 1500mm×1850mm |
| SSB260/20T | 1.5μm L/S | 0.5μm | 1300mm×1500mm 1500mm×1850mm |
Products
CONTACT US
No.1525 Zhangdong Road Zhangjiang Hi-Tech Park Shanghai
info@smee.com.cn
+86-21-51315131
+86-21-58969020
