300 Series Stepper —— LED/ MEMS/ Power Devices
 SSB300 |
 SSB380 |
 SSB320 |
SSB300 series projection stepper is designed for small and medium substrates (≤6 inch) applied in advanced lithography areas. It meets single or double-sided lithography process requirements in HB-LED, MEMS and power devices.
Product Features
● Resolution up to 0.8μm
● Fast online mapping tech
● Precise stitching
● Self-adaption switching between different substrates
● High throughput
● Precise overlay
● Perfectly match with aligner
Specifications
| Model | SSB300 | SSB320 | SSB380 |
| Resolution | 0.8μm | 2μm | 1.5μm |
| Light Source | i-line mercury lamp | i-line mercury lamp | i-line mercury lamp |
| Substrate Size | 100/150 mm | 150/150 mm | 100/150 mm |
| Remark | LED PAD and PSS Process | LED PAD Process | LED PAD Process |
|
Option |
Backside alignment and variable slit |
Backside alignment and variable slit |
Backside alignment and variable slit |
Products
CONTACT US
No.1525 Zhangdong Road Zhangjiang Hi-Tech Park Shanghai
info@smee.com.cn
+86-21-51315131
+86-21-58969020
