FMM Mask PPA Measurement Tool —— AM-OLED FMM Mask Measurement
 SOC260 |
SOC260 series measurement equipment will combine the functions of CD and Total Pitch, which is applied in AM-OLED display screen glass monitoring the specification of FMM mask process.
Product Features
● Gantry air floating structure
● MDOF laser interferometer
● High Accuracy
● High Efficiency
● Flexible Lighting Mode
● Reliable Temperature Control
Specifications
|
Model |
SOC260 |
|
CD Repeatability/span> |
100nm@3sigma（On Metal Mask） |
|
CD Accuracy |
±300nm（On Mapping Glass） |
|
TP Repeatability |
300nm@3sigma（On Mapping Glass） |
|
TP Repeatability |
500nm@3sigma（On Metal Mask） |
Products
CONTACT US
No.1525 Zhangdong Road Zhangjiang Hi-Tech Park Shanghai
info@smee.com.cn
+86-21-51315131
+86-21-58969020
