Measurement Equipment —— Total Pitch/ Center Shift Measurement
 SOM245/10 |
 SOM255/10 |
SOM245 cooperates with lithography equipments, designed for measuring total pitch/ center shift, and compatible with CD/ Overlay and film thickness measurement.
Product Features
● Multiple Functions
● High Measurement Precision
● High Measurement Efficiency
● Precise Temperature Control & Efficient Cleaning System
Specifications
|
Model |
SOM245/10 |
SOM255/10 |
|
CD Repeatability |
30nm@3Sigma |
30nm@3Sigma |
|
CD Reproducibility |
50nm@3Sigma |
50nm@3Sigma |
|
TP Repeatability |
280nm@3Sigma |
300nm@3Sigma |
|
TP Reproducibility |
400nm@3Sigma |
450nm@3Sigma |
Products
CONTACT US
No.1525 Zhangdong Road Zhangjiang Hi-Tech Park Shanghai
info@smee.com.cn
+86-21-51315131
+86-21-58969020
