![]() SPA255/20 |
![]() SPA245/10 |
● Excellent Optical Uniformity
● Precise Polarization Angle Control
● Improved Thermal Control
● Excellent Stage Performance
Mode | SPA245 | SPA255 |
Wavelength | 254nm/ 313nm/ 365nm | 254nm/ 313nm/ 365nm |
Polarization Angle Accuracy | ±0.08° | ±0.08° |
Illumination Uniformity | < 5% | < 5% |
Plate Size | 730mm×920mm | 1100mm×1300mm |