600 Series Scanner —— IC Front-end Manufacturing

SSA600/20

SSC600/10

SSB600/10

By adopting 4X reduction ArF projection lens, self-adaptive focusing and leveling technology and high-speed & high-precision 6 DOF wafer/reticle stage, 600 series scanner is designed for both critical and non-critical layers at 90-nm node, 110-nm node and 280-nm node. 600 series scanner enables mass production of both 200-mm and 300-mm wafers.